They are also ideal for cryogenically cooled AO systems (which I'm working on). Due to the small size, it's much easier and cheaper to cool them. Generally, MEMS mirrors are also composed of only one or two materials, so coefficient of thermal expansion mis-match problems are also reduced.
Slashdot Mirror
They are also ideal for cryogenically cooled AO systems (which I'm working on). Due to the small size, it's much easier and cheaper to cool them. Generally, MEMS mirrors are also composed of only one or two materials, so coefficient of thermal expansion mis-match problems are also reduced.
See here for a longer description.