4 years ago I saw a v-expensive setup at LUCENT
called SCALPEL, which stood for Scattered Angular Limiting Projection Electron Lithography, which uses high and low Z (atomic number) materials to pattern flood illuminate electron-photo-resists down to sub 30nm. The question now is how do you dope at such scales ? a.k.a Quantum doping
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..more on SCALPEL http://www.bell-labs.com/project/SCALPEL/
4 years ago I saw a v-expensive setup at LUCENT called SCALPEL, which stood for Scattered Angular Limiting Projection Electron Lithography, which uses high and low Z (atomic number) materials to pattern flood illuminate electron-photo-resists down to sub 30nm. The question now is how do you dope at such scales ? a.k.a Quantum doping