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IBM and AMD Create First 22nm SRAM Cell

arcticstoat notes an announcement from IBM that, along with technology partners, they have produced the first working sample of a SRAM cell built on a 22nm fabrication process. According to the article, this represents the next generation after 32nm process chips and won't be in products for some years. "The technology was developed with several partners, including AMD, Toshiba, STMicroelectronics and Freescale, as well as the College of Nanoscale Science and Engineering, where IBM performs a lot of its semiconductor research. IBM says that the cell's development involved 'novel fabrication processes,' including high-NA immersion lithography..., high-K metal gate stacks, extremely thin silicide, damascene copper contacts, and advanced activation techniques."

6 of 83 comments (clear)

  1. Remember by Anonymous Coward · · Score: 5, Funny

    apple uses intel processors so we should hate amd and ibm.

    1. Re:Remember by x2A · · Score: 5, Funny

      But IBM put money into linux/oss development (*cheers*) and they fought SCO (*boo's*) who hate so that makes them good... but they also built machines for the nazi's (*boo*) but cuz of the whole nazi thing we have Fanta (*...erm... do we like fanta?*). AMD + ATI = open source graphics drivers (*yay*) but Intel = open source graphics drivers all by themselves (*bigger yay*). IBM, even if they did get shat on during the process, are kinda responsible for putting MS (*smashes bottle and puts broken sharp pieces to its neck*) where it is now.

      Erk... I think I'm going to need to have to create some kinda graphical relationship manager for this one, create a love/hate score for everyone involved, in the same way Google create pageranks, and I'll get back to you on whether we do in fact love or hate IBM or not. Stand by...

      --
      The revolution will not be televised... but it will have a page on Wikipedia
  2. Re:When will it stop? by TheMeuge · · Score: 5, Interesting

    Well, a single silicon atom has a radius of 110pm. I assume silicon dioxide molecule is ~500pm, which is something like 40X smaller than the 22nm process.

    However, silicone dioxide is not perfectly stable and can "leak", as far as I understand it, which limits the process somewhat.

    Again, assuming you need something 100X larger area-wise, you're looking at maybe a factor of 4X remaining until the process can't be shrunk any further.

    But I am not an engineer.

  3. In case you're wondering why SRAM... by Anonymous Coward · · Score: 5, Informative

    New manufacturing processes are typically tested by producing SRAM cells, because they're a relatively typical structure and big arrays of SRAM cells are easily tested to measure the defect rate.

  4. Ah, Silicide by Pope · · Score: 5, Funny

    Like when a clown kills itself.

    --
    It doesn't mean much now, it's built for the future.
  5. Re:IBM and AMD by vigour · · Score: 5, Informative

    In other news IBM and AMD have hired linguists to invent new words for this process. "silicide, damascene copper contacts, and advanced activation techniques." seemed far to cool to saddle with the brand- name of the new "Blubberon(TM)" and "Humpderon(TM) processor line.

    You need to think before mouthing off in ignorance.

    Silicides are silicon based compounds, eg Copper Silicide, Cu_5 S. The high purity of the Si used by IBM etc means that the formation of Silicides in their samples is unlikely to come from impurities in the wafers (Fe, Co, Ni and other transition metals are generally the worst offenders). So they are most likely to form at Si-stack interfaces after annealing (essentially baking) their samples (chips).

    Damascene copper is contacts are small interconnects made in multi-step stages.
    1.There's a lithography step (patterning & chemical wet-etch) to make trenches for the copper connects.
    2.Followed by either electrochemical deposition, or sputtering of the copper.
    3.Finally after an etch/polishing step you have your connects.

    "advanced activation techniques" refers to modifying the surface of the silicon wafer, and/or deposited layers on the silicon to increase deposition rate, and current efficiency. In the case of electrodeposition, you need to aim for a current efficiency of more than 10% (as in, for a given applied potential, measured current/charge, how much metal has been deposited compared to what you would expect). An electrochemist working in industry would be able to give a much more accurate value than this.

    It's all a lot more complicated than this, and optimising each step is a painstaking process, and yes IAAPBOWIMSNSP (I am a physicist, but one working in magnetic systems not semiconductor physics), but that is the general gist of it.