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New Manufacturing Technology Enables Vertical 3D Transistors

MrSeb writes "Applied Materials has taken the wraps off a new etching system meant to turn vertically stacked, three-dimensional transistors from lab experiments into commercial reality. The new Centura Avatar solves multiple problems facing manufacturers who are interested in 3D NAND but find their current equipment not up to the task of actually building it. According to the folks at Applied Materials, trying to build 3D NAND structures in real life would be like trying to dig a one-kilometer-deep, three-kilometer-long trench with walls exactly three meters apart, through interleaved rock strata — and that's before we discuss gate trenches or the staircases. While this machine specifically targets 3D NAND today, a number of the challenges to scaling flash memory apply to scaling CPU logic as well. As for when 3D chips will be available for commercial purchase, Applied Materials was vague on that point, but personally I would expect to see companies adopting the new etch equipment in the next few years."

21 of 75 comments (clear)

  1. oh really? by Anonymous Coward · · Score: 5, Funny

    "would be like trying to dig a one-kilometer-deep, three-kilometer-long trench with walls exactly three meters apart, through interleaved rock strata..."

    No problem dudes, let me fire up Minecraft and I'll show you how its done!

  2. probably not fast to market by v1 · · Score: 2

    I foresee this going at about the pace that perpendicular recording did with hard drives. Remember how we heard about this whiz-bang great new idea years ago, and look how long it took to actually come to the practical market.

    But now it's ubiquitous. So I suppose the same will happen with the chip. And I can see this dealing a crushing blow to the already hurting spinning disc hard drives with them being able to vastly increase flash storage density.

    --
    I work for the Department of Redundancy Department.
    1. Re:probably not fast to market by gman003 · · Score: 2

      Hard drives eventually fail as well. The problem is that current flash memory tends to fail an order of magnitude faster than disks (that's just a rough figure, depends heavily on the specifics of the particular technology being used).

      But this is purely a reliability issue with relatively new technology. They're still figuring out all the oddities, and also (I believe) making a slight trade-off between reliability and storage density.

      Eventually, the failure rates will decrease to the point that flash memory has comparable reliability to spinning disks. Possibly even better.

    2. Re:probably not fast to market by Rockoon · · Score: 2

      It is painfully obvious that the flash itself remains readable when the write limits are reached.. anyone that says different is extremely ignorant of the subject.

      The SSD's that are failing rapidly are not doing so because the flash has reached its erase limits. They are doing so because something else is breaking, and this is immediately obvious when several different companies produce SSD's using flash chips from the same source (in particular, Intel or Sandisk) but have drastically different first-year failure rates.

      Steadfast Networks (aka Karl Zimmerman) reports a 1.6% AFR for the SSD's that they use, but a 5% AFR for the HDD's that they use. Thats with ~150 SSD's (mainly Intel-branded) and ~2800 HDD's so a good but not a great sample size.

      I suspect that many of the "commonly fails" SSD's are simply cutting things too close in the design in an attempt to compete on price with other companies that are also cutting things too close.

      --
      "His name was James Damore."
    3. Re:probably not fast to market by Anonymous Coward · · Score: 4, Informative

      You have to understand that inside one of these "drives" is really a computer with a CPU running embedded software, I/O controllers talking to the SATA host bus, large RAM for buffering data, and a lower level flash interface to manipulate the actual flash storage. The device is then implementing a kind of filesystem on top of the raw flash, keeping track of free/erased flash blocks, wear levels, and the logical mapping to SATA block addresses.

      The entire contents disappearing is not due to flash memory losing all its state at once. It is due to buggy firmware on these "drives" crapping itself and corrupting its own filesystem metadata. This is likely due to it not doing safe journaling, e.g. it performs unsafe flash write sequences that leave flash in an unexpected state if they are interrupted due to power loss or firmware bugs/resets. This is a bit like our old filesystems before they did journaled metadata for crash recovery.

      I wish manufacturers would expose the flash storage and allow the OS to manage this layer, but they're too busy profiting from the illusion of firmware as just another part of the hardware. Everything seems to be trending towards more elaborate embedded software that we cannot review or maintain separately from the devices containing it, forcing artificial lifetime limits on the products.

  3. Wrong units. Please correct the summary. by 140Mandak262Jamuna · · Score: 2
    The summary says:

    dig a one-kilometer-deep, three-kilometer-long trench with walls exactly three meters apart

    Please avoid these strange and esoteric units and use units that are familiar to us. The approved units are football fields for lengths, Olympic size swimming pools for volume and libraries of congress for data volume, Rhode Island or Delaware for area.

    --
    sed -e 's/Chuck Norris/Rajnikant/g' joke > fact
    1. Re:Wrong units. Please correct the summary. by 140Mandak262Jamuna · · Score: 2
      In what way mile and feet are improveents over kilometer and meter? Lengths are always measure in number of football fields. The approved unit for current is number of cows that could be knocked out, as in, "enough juice to knockout 10 cows". Power is measured in medium sized city. As in, "enough power to run three medium sized cities". Force is not measurable, "it is strong" or "it is weak" is the best even the best Jedi knights could do. The midichlorians would make the meter's needle spin wildly. There is a record of someone claiming to have measured midichlorians themselves. But the report is not trustworthy because it comes from the PF [*] era, where even the respected figures had engaged in revisionist history.

      Glossary: PF era: Post Fame era, historians usually place it after the release of ROJ.

      --
      sed -e 's/Chuck Norris/Rajnikant/g' joke > fact
    2. Re:Wrong units. Please correct the summary. by Anonymous Coward · · Score: 2, Funny

      In the UK, we use Wales.

      Especially when describing the size of natural disasters for some reason

    3. Re:Wrong units. Please correct the summary. by 140Mandak262Jamuna · · Score: 2

      See? This is the kind of highly technical nuanced discussions I love in slashdot.

      --
      sed -e 's/Chuck Norris/Rajnikant/g' joke > fact
  4. Re:Only Two Questions: by Baloroth · · Score: 2

    1. Random ballpark guess, I'd say 5 years, and it will probably be extremely expensive then (likely for enterprise and professionals who need extremely high density NAND).
    2. It probably won't, not for a while anyways. It should allow much (much) higher density, but only after they start mass producing it. So, don't expect to be buying 1TB flash cards for $100 anytime soon. It will also almost certainly have major reliability issues for a long time to come, due to the difficulties with the process. Seriously, don't even start looking forward to it yet, it's that far away.

    --
    "None can love freedom heartily, but good men; the rest love not freedom, but license." --John Milton
  5. Pleonasm at twelve o'clock.... by macraig · · Score: 3, Insightful

    There's two semantic goofs in this submission, one in the title and the other in the first sentence, and neither was noticed or corrected by Soulskill. The phrase "vertical 3D transistors" is misleading, since a literal interpretation doesn't describe z-axis stacking and instead describes objects whose most significant dimension is oriented vertically; it would be more accurate to write "stacked 3D transistors". In the first sentence, the adjective phrase "vertically stacked" is certainly a pleonasm if there ever was one; the definition of "stacked" already describes a z-axis or "vertical" state. The use of the word "vertical" in both of those instances is ineffective semantics.

    1. Re:Pleonasm at twelve o'clock.... by Jeng · · Score: 2

      Wow, you really had to work hard to come up with a grammar Nazi response.

      That is actually rather impressive. You get an A+

      --
      Don't know something? Look it up. Still don't know? Then ask.
  6. Re:wait wut? by Baloroth · · Score: 4, Informative

    This technology bears about the same resemblance to what Intel is doing as anaglyph 3D does to a hologram. Intel basically just stuck a 3rd gate on top of two others, stacking normal planar transistors. It's "3D" in the technical sense, but only barely. This new(ish) technology takes essentially a single block and molds it into arbitrarily many levels of transistors, so you can have a stack of dozens or hundreds deep. Much more difficult, and potentially far more rewarding.

    --
    "None can love freedom heartily, but good men; the rest love not freedom, but license." --John Milton
  7. Re:wait wut? by Pinky's+Brain · · Score: 4, Informative

    They aren't talking about non planar FETs ... their 3D NAND requires a far higher anisotropy (the whole 1 km deep 3 m wide bit).

  8. Re:wait wut? by mhajicek · · Score: 4, Insightful

    And potentially far more difficult to get the heat out of.

  9. Not the first... by Sooner+Boomer · · Score: 3, Informative

    I don't believe this is actually the *first* fab process using vertical structures (having actually RTFA). I worked at Texas Instruments in the mid-80's and most of the ALS (Advanced Low power Schottky) devices were of vertical well construction (as opposed to planar process or lateral junction bipolar construction). Looks like the sizes are a lot smaller, and the ratio of depth to width is a lot higher (a lot more junctions stacked in one well).

    --
    Chaos maximizes locally around me.
  10. Re:Only Two Questions: by KingMotley · · Score: 2, Insightful

    I would think this tech will come sooner, and while expensive, it should also increase performance while increasing density. Shorter traces = faster signals and less problems trying to coordinate synchronization between multiple paths since the difference between longest and shortest traces is reduced.

  11. Re:Only Two Questions: by marcosdumay · · Score: 3, Interesting

    1. Random ballpark guess, I'd say 5 years

    Five years are barely enough to get a small modification of a process from a research fab to a real one, if it works flawlessly. A couple more years are typical for technologies that don't work flawlessly at the first try. This process needs an antire new fab, with much more layers than normaly available, and their special etching tech. I wouldn't expect it to get mainstream soon.

  12. they probably won't even need investors by slashmydots · · Score: 2

    With all the SSD money coming in instead of just SD cards, flash drives, and RAM, I bet the main companies will be able to fund this technology and implement it without even the need for external investors. That'll speed things along more than other projects. A lot of vaporware disappears because of a lack of investment money being available of course.

  13. Re:wait wut? by Baloroth · · Score: 2

    Yeah, I'm not sure what they plan on doing about that. Seems like it could be a major issue. They might not even have a solution to that yet, although TFA seems to be thinking this is going to be used for Flash memory, rather than CPU transistors, which makes heat considerably less of an issue.

    --
    "None can love freedom heartily, but good men; the rest love not freedom, but license." --John Milton
  14. Re:wait wut? by MarioMax · · Score: 4, Informative

    Yeah, I'm not sure what they plan on doing about that. Seems like it could be a major issue. They might not even have a solution to that yet, although TFA seems to be thinking this is going to be used for Flash memory, rather than CPU transistors, which makes heat considerably less of an issue.

    NAND memory, and memory in general, is generally first in adopting new process technologies. It's far easier to make (relatively simple) memory circuits (generally consisting of a tiny number of transistors) than it is to make (relatively complex) logic circuits (consisting of orders of magnitude more transistors).